Get started
Author

Dimitry Kouzminov

Observed name: D. Kouzminov
OpenAlex ID: A5079059488
Application of extra‐low impact energy SIMS and data reduction algorithm to USJ profiling
2012 · D. Kouzminov, A. Merkulov, et al. · Surface and Interface Analysis · 12
Characterization of an ultrashallow junction structure using angle resolved x-ray photoelectron spectroscopy and medium energy ion scattering
2008 · G. Saheli, G. Conti, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 6
O2+ versus Cs+ for high depth resolution depth profiling of III–V nitride-based semiconductor devices
2004 · M. Kachan, J. Hunter, et al. · Applied Surface Science · 6
4H to 3C Polytypic Transformation in Al+ Implanted SiC During High Temperature Annealing
2023 · L. Kuebler, E. Hershkovitz, et al. · Electronic Materials Letters · 5
Enable abrupt junction and advanced salicide formation with dynamic surface annealing
2012 · Shiyu Sun, Shankar Muthukrishnan, et al. · Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics · 5
Quantitative Aspects of PLAD Sidewall Doping Characterization by SIMS and APT
2018 · Dimitry Kouzminov, James Cournoyer, et al. · Microscopy and Microanalysis · 4
The role of carbon capping and Ar pressure on SiC surface degradation during high temperature annealing
2024 · L. Kuebler, E. Hershkovitz, et al. · Applied Surface Science · 3
Low energy electron induced X-ray emission spectrometry (LEXES) and secondary ion mass spectrometry (SIMS) sensitivity studies to ultra shallow arsenic implants
2005 · H. Graoui, G. Conti, et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 3
28nm Device improvement studies by replacing Indium with Gallium halo
2014 · Y. L. Chin, C. H. Wei, et al. · International Workshop on Junction Technology · 2
Front- and back-end process characterization by SIMS to achieve electrically matched devices
2004 · Thanas Budri, Dimitry Kouzminov · Applied Surface Science · 2
Impact of gallium implant for advanced CMOS halo/pocket optimization
2014 · Y.L. Chin, C.Y. Yang, et al. · International Conference on Ion Implantation Technology · 1
Integration of millisecond and spike anneals for dopant activation optimization
2013 · Shiyu Sun, Shashank Sharma, et al. · International Workshop on Junction Technology · 1
Cryogenic ion implantation near amorphization threshold dose for halo/extension junction improvement in sub-30 nm device technologies
2012 · Hugh Park, Stan Todorov, et al. · AIP conference proceedings · 1
Comparison of indium metrology using LEXES and SIMS [semiconductor doping]
2002 · D. Kouzminov, Yupu Li Yupu Li, et al. · International Conference on Ion Implantation Technology · 1
EFFECTS OF BORON CONCENTRATION ON Si1-XGEX PROPERTIES FOR INTEGRATED MEMS TECHNOLOGY
2004 · M.-A.N. Eyoum, Y.R. Su, et al. · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop)
PDF
Works count: 15
Citation count: 52
H-index: 5
I10-index: 1
Year
Topic
Type