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Jean-Philippe Piel

Observed names: J. Ph. Piel, J.Ph Piel, Jean-Philippe PIEL, Piel, Jean-Philippe
Institution: Sopra (France)
Observed institution: Sopra (France)
OpenAlex ID: A5109986702
High accuracy IR ellipsometer working with a Ge Brewster angle reflection polarizer and grid analyzer
1998 · Michel Luttmann, Jean-Louis Stehle, et al. · Thin Solid Films · 19
IR spectroscopic ellipsometry: instrumentation and applications in semiconductors
1993 · Gilbert Zalczer, Olivier Thomas, et al. · Thin Solid Films · 10
Ellipsométrie - Instrumentation et applications
2003 · Frank BERNOUX, Jean-Philippe PIEL, et al. · 8
New method for determination of the photoresist Dill parameters using spectroscopic ellipsometry
1999 · Pierre Boher, Christophe Defranoux, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 7
Deep ultra-violet measurements of SiON anti-reflective coatings by spectroscopic ellipsometry
1998 · Christophe Defranoux, Jean-Philippe Piel, et al. · Thin Solid Films · 7
Characterization of resists and antireflective coatings by spectroscopic ellipsometry in the UV and deep-UV range
1996 · Pierre Boher, Jean-Philippe Piel, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 6
New purged UV spectroscopic ellipsometer to characterize thin films and multilayers at 157 nm
2000 · Pierre Boher, Jean-Philippe Piel, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 5
IR spectroscopic ellipsometry for industrial characterization of semiconductors
2001 · Pierre Boher, Marc Bucchia, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 4
Automated metrology system including VUV spectroscopic ellipsometry and X-ray reflectometry for 300 mm silicon microelectronics
2004 · P Boher, P Evrard, et al. · Thin Solid Films · 3
Feasibility and applicability of integrated metrology using spectroscopic ellipsometry in a cluster tool
2000 · Pierre Boher, Christopher Pickering, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3
Precise measurement of ARC optical indices in the deep-UV range by variable-angle spectroscopic ellipsometry
1997 · Pierre Boher, Jean-Louis P. Stehle, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3
A Comparison of TSV Etch Metrology Techniques
2018 · Vienne, Guillaume, Milord, Laurent, et al. · HAL · 2
Combined metrology including VUV spectroscopic ellipsometer and grazing x-ray reflectance for precise characterization of thin films and multilayers at 157 nm
2001 · Pierre Boher, Patrick Evrard, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2
New purged UV spectroscopic ellipsometer to characterize thin films and multilayers at 157 nm
2000 · Pierre Boher, Patrick Evrard, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2
Broadband UV small-spot spectroscopic ellipsometer
1995 · Timothy R. Piwonka-Corle, Torsten R. Kaack, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2
Metrology and Inspection
2015 · Gilles Fresquet, Jean-Philippe Piel, et al. · Springer eBooks · 1
Optical Characterization and Defect inspection for 3D stacked IC technology
2014 · Gilles Fresquet, Jean-Philippe Piel · IMAPSource Proceedings · 1
Multi-pass spectroscopic ellipsometry
2013 · Jean-Louis Stehle, Peter C. Samartzis, et al. · Thin Solid Films · 1
Use of Voigt oscillators to characterize microelectronics materials by Infrared Spectroscopic Ellipsometry
2008 · Mickael Gilliot, Jean-Philippe Piel · Thin Solid Films · 1
Phase-shifting interference microscope for the characterization of metallic interconnections of flat panel displays
2001 · Pierre Boher, Jean-Philippe Piel, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1
Spectroscopic ellipsometry and photometry applied to color filter characterization
1996 · Christophe Defranoux, Jean-Philippe Piel, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1
Fine characterization of ITO layers by spectroscopic ellipsometry
1996 · Pierre Boher, Christophe Defranoux, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1
High Performance Fourier Transform IR Ellipsometer
2022 · Michel Luttmann, Jean-Louis Stehle, et al. · Fourier Transform Spectroscopy
New measuring technique of complex index of immersion liquids
2006 · Jean-Louis Stehlé, Jean-Philippe Piel, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
Spectroscopic polarized scatterometry applied to single-line profiling
2006 · Jean-Louis Stehlé, Jean-Philippe Piel, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
Works count: 36
Citation count: 90
H-index: 6
I10-index: 2
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