Work

Characterization of resists and antireflective coatings by spectroscopic ellipsometry in the UV and deep-UV range

Year: 1996

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.240988

Authors: Pierre Boher, Jean-Philippe Piel, Christophe Defranoux, Jean-Louis P. Stehle, Louis Hennet

Institutions: Sopra (France), Université Henri Poincaré

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2013664586

FWCI: 10.33

Cites:

Cited by: 6

Related to: 10