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G. F. Cardinale

On the role of ions in the formation of cubic boron nitride films by ion-assisted deposition
1994 · P.B. Mirkarimi, K.F. McCarty, et al. · Journal of materials research/Pratt's guide to venture capital sources · 200
Analysis of residual stress in cubic boron nitride thin films using micromachined cantilever beams
1996 · G.F. Cardinale, D.G. Howitt, et al. · Diamond and Related Materials · 68
Effects of ambient conditions on the adhesion of cubic boron nitride films on silicon substrates
1994 · G.F. Cardinale, P.B. Mirkarimi, et al. · Thin Solid Films · 64
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Crystallographic texture in cubic boron nitride thin films
1996 · D. L. Medlin, T. A. Friedmann, et al. · Journal of Applied Physics · 56
Substrate effects in cubic boron nitride film formation
1996 · P. B. Mirkarimi, K. F. McCarty, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 50
Fracture strength and biaxial modulus measurement of plasma silicon nitride films
1992 · G.F. Cardinale, R.W. Tustison · Thin Solid Films · 47
Fracture strength measurement of filament assisted CVD polycrystalline diamond films
1992 · G.F. Cardinale, C.J. Robinson · Journal of materials research/Pratt's guide to venture capital sources · 38
Orientation-dependence of elastic strain energy in hexagonal and cubic boron nitride layers in energetically deposited BN films
1997 · G. F. Cardinale, D. L. Medlin, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 33
Demonstration of pattern transfer into sub-100 nm polysilicon line/space features patterned with extreme ultraviolet lithography
1999 · G. F. Cardinale, C. C. Henderson, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 32
Fabrication of a surface acoustic wave-based correlator using step-and-flash imprint lithography
2004 · G. F. Cardinale, J. L. Skinner, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 24
Method for compensation of extreme-ultraviolet multilayer defects
1999 · A. K. Ray-Chaudhuri, G. Cardinale, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 20
Extreme ultraviolet lithography mask patterning and printability studies with a Ta-based absorber
1999 · P. J. S. Mangat, S. D. Hector, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 19
Biaxial modulus measurement of chemical vapor deposited polycrystalline diamond films
1991 · G. F. Cardinale, R. W. Tustison · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 18
Micromachined silicon cantilever beams for thin-film stress measurement
1996 · G.F. Cardinale, D.G. Howitt, et al. · Thin Solid Films · 12
Fabrication of metal–oxide–semiconductor devices with extreme ultraviolet lithography
1996 · K. B. Nguyen, G. F. Cardinale, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 11
Top Surface Imaging for Extreme Ultraviolet Lithography.
1998 · Craig Henderson, David Wheeler, et al. · Journal of Photopolymer Science and Technology · 10
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Extreme ultraviolet lithography based nanofabrication using a bilevel photoresist
2004 · A. A. Talin, G. F. Cardinale, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 9
Effects of smoothing on defect printability at extreme ultraviolet wavelengths
2000 · G. F. Cardinale, A. K. Ray-Chaudhuri, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 6
Top surface imaging process and materials development for 193 nm and extreme ultraviolet lithography
1998 · Veena Rao, John Hutchinson, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 6
Effect of critical dimension variation on SAW correlator energy
2006 · J.L. Skinner, G.F. Cardinale, et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 5
Comparison of ion beam sputtered chromium and iridium films for electron microscopy applications
1993 · G. F. Cardinale, V. L. Carlino, et al. · Scanning · 4
Fabrication of MOS devices with extreme ultraviolet lithography
1996 · K. B. Nguyen, G. F. Cardinale, et al. · 1
Saddle-field ion source deposition of conductive thin films
1993 · G. F. Cardinale, D. G. Howitt · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1
Mechanical property measurement of polycrystalline diamond films
1990 · G. F. Cardinale, R. W. Tustison · Unknow
Works count: 24
Citation count: 734
H-index: 13
I10-index: 16
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