Author

Young-Bum Koh

Observed names: Young B. Koh Young B. Koh, Young Bum Koh, Young Bum Koh Young Bum Koh, Young-Bum Koh Young-Bum Koh

Institutions: Samsung (South Korea), Samsung Electronics (South Korea)

Observed institutions: Korea Advanced Institute of Science and Technology, Samsung (South Korea), Samsung Electronics (South Korea), The University of Osaka

OpenAlex ID: A5110034192

Control of Etch Slope during Etching of Pt in Ar/Cl2/O2 Plasmas

1996 · Won Jong Yoo, Jin Hwan Hahm, et al. · Japanese Journal of Applied Physics · 67

Preparation and Electrical Properties of SrTiO3 Thin Films Deposited by Liquid Source Metal-Organic Chemical Vapor Deposition (MOCVD)

1996 · Chang Seok Kang, Cheol Seong Hwang, et al. · Japanese Journal of Applied Physics · 52

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Preparation and Characterization of Iridium Oxide Thin Films Grown by DC Reactive Sputtering

1997 · Hag-Ju Cho, Hideki Horii, et al. · Japanese Journal of Applied Physics · 29

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Characteristics of PECVD grown tungsten nitride films as diffusion barrier layers for ULSI DRAM applications

1997 · Byung Lyul Park, Dae-Hong Ko, et al. · Journal of Electronic Materials · 21

Effects of Conductivity of Polysilicon on Profile Distortion

1996 · Kyeong Koo Chi, Hwa Sook Shin, et al. · Japanese Journal of Applied Physics · 19

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Titanium oxide film for the bottom antireflective layer in deep ultraviolet lithography

1997 · Byung-Hyuk Jun, Sang-Soo Han, et al. · Applied Optics · 13

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Simulation and fabrication of attenuated phase-shifting masks: CrF_x

1997 · Eunah Kim, Seungbum Hong, et al. · Applied Optics · 11

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A simulation model for thickness profile of the film deposited using planar circular type magnetron sputtering sources

1996 · Seungbum Hong, Eunah Kim, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 11

Effects of gas ring position and mesh introduction on film quality and thickness uniformity

1997 · Seungbum Hong, Eunah Kim, et al. · Materials Science and Engineering B · 10

Optical property simulation of single-layer halftone phaseshifting masks for DUV microlithography

1996 · Zhong-Tao Jiang, Seungbum Hong, et al. · Semiconductor Science and Technology · 8

Direct Patterning of Spin-on Glass by Focused Ion Beam Irradiation

1992 · Young-Bum Koh, Toshikazu Goto, et al. · Japanese Journal of Applied Physics · 8

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Effect of SiO2 Film Deposition on the Ferroelectric Properties of a Pt/Pb(Zr, Ti)O3/Pt Capacitor

1997 · Sejun Oh Park, Byung Hee Kim, et al. · Japanese Journal of Applied Physics · 7

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Deep-UV positive-tone dry-development process using chemically amplified resist and its application to 256 Mbit DRAM

1993 · Woo-Sung Han, Joong-Hyun Lee, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 7

Correlation between gate oxide reliability and the profile of the trench top corner in Shallow Trench Isolation (STI)

2002 · Tai-Su Park, Yu Gyun Shin, et al. · Technical digest - International Electron Devices Meeting/Technical digest · 6

Single-layer halftone phase-shifting masks for DUV microlithography: optical property simulation and chromium compound film preparation

1997 · Zhong-Tao Jiang, Seungbum Hong, et al. · Applied Surface Science · 6

Investigation on application of chromium-based materials to attenuated phase-shift masks for DUV exposure

1996 · Seungbum Hong, Eunah Kim, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 5

Design Considerations for Patterned Wafer Bonding

1997 · Giho Cha, Byoung H. Lee, et al. · Japanese Journal of Applied Physics · 4

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Application of alternating phase shift mask to device fabrication

1995 · Sunggi Kim, Sang-Gyun Woo, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 4

New method of tilted illumination using grating mask: advanced tilted illumination on mask

1993 · Hoyoung Kang, Chul Hong Kim, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 4

Ion beam irradiation effect on solubility of spin-on glass to methanol

1993 · Junichi Yanagisawa, Young-Bum Koh, et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 4

Hydrodynamics and Coal Combustion Characteristics of Circulating Fluidized Beds

1984 · Byung-Chul Shin, Young-Bum Koh, et al. · Korean Journal of Chemical Engineering · 4

Stability of CrFx films for phase-shifting mask

1997 · Eunah Kim, Seungbum Hong, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3

Fluorinated silicon nitride film for the bottom antireflective layer in quarter micron optical lithography

1997 · Byung-Hyuk Jun, Sang-Soo Han, et al. · Semiconductor Science and Technology · 3

Improved overlay measurement of CMP processed layers

1996 · Jeong-Ho Yeo, Jeong-Lim Nam, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3

A New Post-Treatment for Chemical-Mechanical Polishing Process of Very Large-Scale Integrated Circuit Tungsten Vias

1998 · Heungsoo Park, Yong-Jun Cho, et al. · Japanese Journal of Applied Physics · 2

Works count: 51

Citation count: 326

H-index: 9

I10-index: 9