Get started
Author

S. Kurth

BEOL embedded RF-MEMS switch for mm-wave applications
2009 · M. Kaynak, K. E. Ehwald, et al. · Technical digest - International Electron Devices Meeting/Technical digest · 50
Simulation of gas damping in microstructures with nontrivial geometries
2002 · J. Mehner, S. Kurth, et al. · IEEE International Conference on Micro Electro Mechanical Systems (MEMS) · 36
Silicon mirrors and micromirror arrays for spatial laser beam modulation
2002 · W. Dotzel, T. Gessner, et al. · International Conference on Solid-State Sensors, Actuators and Microsystems · 25
Dual-band MEMS Fabry-Pérot filter with two movable reflectors for mid- and long-wave infrared microspectrometers
2011 · M. Meinig, M. Ebermann, et al. · International Conference on Solid-State Sensors, Actuators and Microsystems · 24
Experimental adaptation of model parameters for microelectromechanical systems (MEMS)
1997 · S. Kurth, W. Dötzel · Sensors and Actuators A Physical · 15
A MEMS friction vacuum gauge suitable for high temperature environment
2007 · D. Tenholte, S. Kurth, et al. · Sensors and Actuators A Physical · 14
Micro arc welding for electrode gap reduction of high aspect ratio microstructures
2011 · M. Nowack, S. Leidich, et al. · Sensors and Actuators A Physical · 12
Micromachined mid-infrared tunable Fabry-Perot filter
2005 · N. Neumann, K. Hiller, et al. · International Conference on Solid-State Sensors, Actuators and Microsystems · 9
A fast MEMS infrared microspectrometer for the measurement of hydrocarbon gases
2015 · M. Ebermann, N. Neumann, et al. · International Conference on Solid-State Sensors, Actuators and Microsystems · 5
Investigation of Aluminum and Gold Flip-Chip Bonding for Quantum Device Integration
2023 · I. Cirulis, U. Zschenderlein, et al. · European Microelectronics and Packaging Conference · 4
MEMS module integration into SiGe BiCMOS technology for embedded system applications
2011 · M. Kaynak, M. Wietstruck, et al. · International Semiconductor Conference Dresden-Grenoble (ISCDG) · 4
Parameter Identification of Pressure Sensors by Static and Dynamic Measurements
2008 · Michael, S., Kurth, S., et al. · arXiv (Cornell University) · 4
PDF
Analysis of image quality for laser display scanner test
2009 · H. Specht, S. Kurth, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2
Full-Field Through-Chip IR-Thermography-based Quality Testing & Failure Analysis on Electroplated Aluminium Interconnects for Cryogenic Applications in Ion-Trap Quantum Computers
2024 · D. May, B. Wunderle, et al. · International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) · 1
Novel post-process gap reduction technology of high aspect ratio microstructures ultilizing micro welding
2011 · M. Nowack, S. Leidich, et al. · International Conference on Solid-State Sensors, Actuators and Microsystems · 1
Full-Field IR-Thermography for Bond-Quality Inspection of Electroplated Aluminium Interconnects for Cryo-SiP Architectures
2024 · B. Wunderle, D. May, et al. · Electronic System-Integration Technology Conference (ESTC)
Investigation of Aluminum and Gold Flip-Chip Bonding for Quantum Device Integration
2024 · I. Cirulis, U. Zschenderlein, et al. · IMAPSource Proceedings
PDF
2.2 - Enhanced resolution Fabry-Pérot microspectrometers
2015 · M. Ebermann, N. Neumann, et al.
PDF
Roll-to-roll infrared sintering of gravure printed silver patterns in applications of back-injection-molded functional lightweight structures
2014 · M. Hartwig, P. Ueberfuhr, et al. · Technical programs and proceedings/Technical program and proceedings
PDF
(Keynote) Smart Systems for a Better Life
2013 · T. Gessner, M. Vogel, et al. · ECS Transactions
PDF
Slot-antenna for autonomous sensor systems mounted on overhead power lines
2011 · S. Leidich, S. Voigt, et al. · IEEE MTT-S International Microwave Symposium digest
Slot-antenna for autonomous sensor systems mounted on overhead power lines
2011 · S. Leidich, S. Voigt, et al. · IEEE MTT-S International Microwave Symposium digest
Complex miniaturized analysis system for nuclear magnetic resonance spectroscopy of nanoliter amounts of biological sample material
2008 · Leidich, S., Riemer, T., et al. · Publikationsdatenbank der Fraunhofer-Gesellschaft (Fraunhofer-Gesellschaft)
Advanced Silicon Micromachining
2003 · T. GESSNER, A. BERTZ, et al. · International Journal of Computational Engineering Science
Works count: 24
Citation count: 206
H-index: 8
I10-index: 7
Year
Topic
Type