Work

A MEMS friction vacuum gauge suitable for high temperature environment

Year: 2007

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/j.sna.2007.05.031

Authors: D. Tenholte, S. Kurth, T. Geßner, W. Dötzel

Institutions: Chemnitz University of Technology, Fraunhofer Institute for Reliability and Microintegration

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2071024951

FWCI: 0.297

Cites: 13

Cited by: 14

Related to: 10