Product
Help
Pricing
About
Jobs
Log in
Get started
Author
Add to collection
Sheng-Min Chiu
Institution:
KLA (United States)
Observed institution:
KLA (United States)
OpenAlex ID:
A5111682187
Advanced Spectroscopic Ellipsometry Application for Multi-Layers SiGe at 28nm Node and Beyond
2013
·
Teng-Chun Hsuan
, Yi-Cheng Hu
, et al.
·
ECS Transactions
·
2
PDF
Fast and Accurate in-Line Monitor of Boron Implantation Energy and Dose by Spectroscopic Ellipsometry
2014
·
Tsai-Yu Wen
, Tsuo-Wen Lu
, et al.
·
ECS Transactions
Fast and Accurate in-Line Monitor of Boron Implantation Energy and Dose by Spectroscopic Ellipsometry
2014
·
Tsai-Yu Wen
, Tsuo-Wen Lu
, et al.
·
ECS Meeting Abstracts
Advanced Spectroscopic Ellipsometry Application for Multi-Layers Sige At 28nm Node and Beyond
2013
·
Teng-Chun Hsuan
, Yi-Cheng Hu
, et al.
·
ECS Meeting Abstracts
PDF
Show more works
View as search
Works count:
4
Citation count:
2
H-index:
1
I10-index:
Year
Topic
Type
