Work

Fast and Accurate in-Line Monitor of Boron Implantation Energy and Dose by Spectroscopic Ellipsometry

Year: 2014

Type: conference-paper

Source: ECS Transactions

DOI: 10.1149/06406.0417ecst

Authors: Tsai-Yu Wen, Tsuo-Wen Lu, Yu-Ren Wang, Chin-Fu Lin, J Y Wu, Shao-Ju Chang, Sheng-Min Chiu, Chien-Jen Huang, Chao-Yu Cheng, Juli Cheng, Getin Raphael, Zhiming Jiang, Zhengquan Tan

Institutions: United Microelectronics (United States), KLA (United States)

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2024030438

FWCI:

Cites:

Cited by:

Related to: 10