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M. Narihiro
Observed names:
Mitsuru Narihiro,
Mitsuru Narihiro Mitsuru Narihiro
Institution:
Renesas Electronics (Japan)
Observed institutions:
NEC (Japan),
Renesas Electronics (Japan)
OpenAlex ID:
A5113630003
Low-power embedded ReRAM technology for IoT applications
2015
·
M. Ueki
, K. Takeuchi
, et al.
·
Symposium on VLSI Technology
·
70
Sub-10-nm planar-bulk-CMOS devices using lateral junction control
2004
·
H. Wakabayashi
, S. Yamagami
, et al.
·
Technical digest - International Electron Devices Meeting/Technical digest
·
65
Characteristics and Modeling of Sub-10-nm Planar Bulk CMOS Devices Fabricated by Lateral Source/Drain Junction Control
2006
·
H. Wakabayashi
, T. Ezaki
, et al.
·
IEEE Transactions on Electron Devices
·
39
45-nm gate length CMOS technology and beyond using steep halo
2002
·
H. Wakabayashi
, M. Ueki
, et al.
·
Technical digest - International Electron Devices Meeting/Technical digest
·
39
Sub-50-nm physical gate length CMOS technology and beyond using steep halo
2002
·
H. Wakabayashi
, M. Ueki
, et al.
·
IEEE Transactions on Electron Devices
·
38
Low-power embedded ReRAM technology for IoT applications
2015
·
M. Ueki
, K. T. Akeuchi
, et al.
·
Symposium on VLSI Circuits
·
35
Operation of functional circuit elements using BEOL-transistor with InGaZnO channel for on-chip high/low voltage bridging I/Os and high-current switches
2012
·
K. Kaneko
, H. Sunamura
, et al.
·
Symposium on VLSI Technology
·
18
High-voltage complementary BEOL-FETs on Cu interconnects using N-type IGZO and P-type SnO dual oxide semiconductor channels
2013
·
H. Sunamura
, K. Kaneko
, et al.
·
Symposium on VLSI Technology
·
15
Feasibility Study of 45-nm-Node Scaled-Down Cu Interconnects With Molecular-Pore-Stacking (MPS) SiOCH Films
2007
·
Munehiro Tada
, Hiroto Ohtake
, et al.
·
IEEE Transactions on Electron Devices
·
13
Robust porous SiOCH/Cu interconnects with ultrathin sidewall protection liners
2006
·
M. Tada
, T. Tamura
, et al.
·
IEEE Transactions on Electron Devices
·
13
Highly reliable, 65 nm-node Cu dual damascene interconnects with full porous-SiOCH (k=2.5) films for low-power ASICs
2004
·
M. Ueki
, M. Narihiro
, et al.
·
Symposium on VLSI Technology
·
11
Performance of new E-beam lithography system JBX-9300FS
2000
·
H. Takemura
, H. Ohki
, et al.
·
Microelectronic Engineering
·
11
High on/off-ratio P-type oxide-based transistors integrated onto Cu-interconnects for on-chip high/low voltage-bridging BEOL-CMOS I/Os
2012
·
H. Sunamura
, K. Kaneko
, et al.
·
Technical digest - International Electron Devices Meeting/Technical digest
·
10
Stabilizing Schemes for the Minority Failure Bits in Ta 2 O 5 -Based ReRAM Macro
2017
·
Makoto Ueki
, Yoshihiro Hayashi
, et al.
·
IEEE Transactions on Electron Devices
·
9
Pushing Planar Bulk CMOSFET Scaling to its Limit by Ultimately Shallow Diffusion-Less Junction
2007
·
K. Uejima
, K. Yako
, et al.
·
Technical digest - International Electron Devices Meeting/Technical digest
·
9
A 65nm-node, Cu interconnect technology using porous SiOCH film (k=2.5) covered with ultra-thin, low-k pore seal (k=2.7)
2004
·
M. Tada
, Y. Harada
, et al.
·
Technical digest - International Electron Devices Meeting/Technical digest
·
9
Estimation of Optimum Electron-Beam Projection Lithography Mask Biases Taking Coulomb Beam Blur into Consideration
2003
·
Hideo Kobinata
, Yasuhisa Yamada
, et al.
·
Japanese Journal of Applied Physics
·
9
Interfacial Atomic Structure Between Pt-Added NiSi and Si(001)
2011
·
Nobuyuki Ikarashi
, Mitsuru Narihiro
, et al.
·
Japanese Journal of Applied Physics
·
8
PDF
Robust Low Oxygen Content Cu Alloy for Scaled-Down ULSI Interconnects Based on Metallurgical Thermodynamic Principles
2009
·
Yoshihiro Hayashi
, Mari Abe
, et al.
·
IEEE Transactions on Electron Devices
·
7
High-Performance Cu-Interconnects with Novel Seamless Low-k SiOCH Stacks (SEALS) Featured by Compositional Modulation Process for 45nm-Node ULSI Devices
2006
·
M. Tagami
, H. Ohtake
, et al.
·
Symposium on VLSI Technology
·
7
Enhanced drivability of high-Vbd dual-oxide-based complementary BEOL-FETs for compact on-chip pre-driver applications
2014
·
H. Sunamura
, N. Inoue
, et al.
·
Symposium on VLSI Technology
·
6
Plasma Co-polymerization Technology with Molecular-level Structure Tightening in "In-situ" SiOCH Stacks for 32nm-node Cu Interconnects
2006
·
M. Tada
, H. Yamamoto
, et al.
·
Technical digest - International Electron Devices Meeting/Technical digest
·
6
Feasibility study of a novel molecular-pore-stacking (MPS), SiOCH film in fully-scale-down, 45nm-node Cu damascene interconnects
2005
·
M. Tada
, H. Ohtake
, et al.
·
Symposium on VLSI Technology
·
6
10-nm-Scale Pattern Delineation Using Calixarene Electron Beam Resist for Complementary Metal Oxide Semiconductor Gate Etching
2005
·
Mitsuru Narihiro
, Kohichi Arai
, et al.
·
Japanese Journal of Applied Physics
·
5
PDF
A 0.10-/spl mu/m CMOS device with a 40-nm gate sidewall and multilevel interconnects for system LSI
1999
·
H. Wakabayashi
, T. Yamamoto
, et al.
·
Symposium on VLSI Technology
·
5
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Works count:
44
Citation count:
482
H-index:
11
I10-index:
13
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