Concept

Next-generation lithography

OpenAlex ID: C163581340

Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography

2000 · Marc A. Unger, Hou-Pu Chou, et al. · Science · 4,077

Soft Lithography in Biology and Biochemistry

2001 · George M. Whitesides, Emanuele Ostuni, et al. · Annual Review of Biomedical Engineering · 2,648

1996 · Stephen Y. Chou, Peter R. Krauss, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1,785

Patterning proteins and cells using soft lithography

1999 · R Kane · Biomaterials · 1,508

Electron beam lithography: resolution limits and applications

2000 · C. Vieu, F. Carcenac, et al. · Applied Surface Science · 1,196

Sub-10 nm imprint lithography and applications

1997 · Stephen Y. Chou, Peter R. Krauss, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1,131

Pushing the limits of lithography

2000 · Takashi Ito, Shinji Okazaki · Nature · 926

Three‐dimensional optical laser lithography beyond the diffraction limit

2012 · Joachim Fischer, Martin Wegener · Laser & Photonics Review · 725

Lithography gets extreme

2009 · Christian Wagner, Noreen Harned · Nature Photonics · 661

Fabrication of 5nm linewidth and 14nm pitch features by nanoimprint lithography

2004 · Michael D. Austin, Haixiong Ge, et al. · Applied Physics Letters · 615

Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size

2013 · Zongsong Gan, Yaoyu Cao, et al. · Nature Communications · 581

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Electron beam lithography in nanoscale fabrication: recent development

2003 · A.A. Tseng, Kuan Chen, et al. · IEEE Transactions on Electronics Packaging Manufacturing · 553

Plasmonic Nanolithography

2004 · Werayut Srituravanich, Nicholas Fang, et al. · Nano Letters · 528

Capillary Force Lithography

2001 · K. Y. Suh, Y. S. Kim, et al. · Advanced Materials · 475

Resists for sub-20-nm electron beam lithography with a focus on HSQ: state of the art

2009 · A E Grigorescu, C W Hagen · Nanotechnology · 436

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Polymer Imprint Lithography with Molecular-Scale Resolution

2004 · Feng Hua, Yugang Sun, et al. · Nano Letters · 427

Lithography and Other Patterning Techniques for Future Electronics

2008 · R.F. Pease, S.Y. Chou · Proceedings of the IEEE · 425

Extreme ultraviolet lithography: A review

2007 · Banqiu Wu, Ajay Kumar · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 412

Imprint lithography with sub-10 nm feature size and high throughput

1997 · Stephen Y. Chou, Peter R. Krauss · Microelectronic Engineering · 376

Subnanometer Linewidth Uniformity in Silicon Nanophotonic Waveguide Devices Using CMOS Fabrication Technology

2009 · Shankar Kumar Selvaraja, Wim Bogaerts, et al. · IEEE Journal of Selected Topics in Quantum Electronics · 319

Two-photon lithography of nanorods in SU-8 photoresist

2005 · Saulius Juodkazis, Vygantas Mizeikis, et al. · Nanotechnology · 311

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Ion Beam Lithography and Nanofabrication: a Review

2005 · F. WATT, A. A. BETTIOL, et al. · International Journal of Nanoscience · 310

Fabrication of a 50 nm half-pitch wire grid polarizer using nanoimprint lithography

2005 · Seh-Won Ahn, Ki-Dong Lee, et al. · Nanotechnology · 308

Interference lithography: a powerful tool for fabricating periodic structures