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Subwavelength Optical Lithography with Phase-Shift Photomasks

Year: 2003

Type: article

Authors: M. Fritze, Brian Tyrrell, David K. Astolfi, Renee Lambert, D. Yost, Anthony R. Forte, Susan G. Cann, B.D. Wheeler

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W109174641

FWCI:

Cites: 14

Cited by: 20

Related to: 10