Work

Advanced metrology tool for Si/sub 1-x/Ge/sub x/ characterization: Infrared Spectroscopic Ellipsometer (IRSE)

Year: 2004

Type: conference-paper

Source: ASMC proceedings

DOI: 10.1109/asmc.2004.1309609

Authors: D. Enicks, I-L Teng, J. Rubino, L. Sun, C. Defranoux, S. Bourtault, P. Hendrich, J.-L. Stehle

Institutions: Atmel (United States), Sopra (France)

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1663014858

FWCI:

Cites: 6

Cited by:

Related to: 10