Work

Impact of crystallization behavior of SrxTiyOz films on electrical properties of metal-insulator-metal capacitors with TiN electrodes

Year: 2010

Type: article

Source: Applied Physics Letters

DOI: 10.1063/1.3505323

Authors: M. A. Pawlak, B. Kaczer, M.-S. Kim, M. Popovici, K. Tomida, J. Swerts, K. Opsomer, W. Polspoel, P. Favia, C. Vrancken, C. Demeurisse, W.-C. Wang, V. V. Afanas’ev, W. Vandervorst, H. Bender, I. Debusschere, L. Altimime, J. A. Kittl

Institutions: IMEC, KU Leuven

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W192530168

FWCI: 3.099

Cites: 6

Cited by: 31

Related to: 10