Rapid thermal oxidation of silicon monoxide
Year: 1987
Type: article
Source: Applied Physics Letters
DOI: 10.1063/1.98433
Authors: E. Fogarassy, A. Slaoui, C. Fuchs, J. L. Regolini
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1978185959