Work

Highly accurate modeling by using 2-dimensional calibration data set for model-based OPC verification

Year: 2006

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.681855

Authors: Cheol-kyun Kim, Jae-Seung Choi, Byung-Ho Nam, DongGyu Yim

Institution: SK Hynix (South Korea)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1978429025

FWCI: 0.529

Cites:

Cited by: 1

Related to: 10