Work

Infrared spectroscopic ellipsometry in semiconductor manufacturing

Year: 2004

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.533935

Authors: Pierre-Yves Guittet, Ulrich Mantz, Peter Weidner, Jean-Louis Stehle, Marc Bucchia, Sophie Bourtault, Dorian Zahorski

Institutions: Infineon Technologies (Germany), Sopra (France)

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1981302246

FWCI:

Cites:

Cited by: 3

Related to: 10