Work

Hf- and Zr-based alkaline earth perovskite dielectrics for memory applications

Year: 2009

Type: article

Source: Microelectronic Engineering

DOI: 10.1016/j.mee.2009.03.019

Authors: G. Łupina, O. Seifarth, G. Kozłowski, P. Dudek, J. Dąbrowski, G. Lippert, H.-J. Müssig

Institution: Leibniz Institute for High Performance Microelectronics

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Bundesministerium für Bildung und Forschung

OpenAlex ID: W1990245281

FWCI: 1.547

Cites: 8

Cited by: 24

Related to: 10