Work

Development of optical component for EUV phase-shift microscopes

Year: 2007

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.711997

Authors: Yoshio Mizuta, Masafumi Osugi, Jyunki Kishimoto, Noriyuki Sakaya, Kazuhiro Hamamoto, Takeo Watanabe, Hiroo Kinoshita

Institutions: University of Hyogo, Japan Science and Technology Agency, Hoya (Japan)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2005138205

FWCI: 1.004

Cites:

Cited by: 6

Related to: 10