“Abnormal” angle response curves of TW/Rs for near zero tilt and high tilt channeling implants
Year: 2012
Type: conference-paper
Source: AIP conference proceedings
DOI: 10.1063/1.4766504
Authors: Baonian Guo, Hans-Joachim Gossmann, Terry Toh, Benjamin Colombeau, Stan Todorov, Frank Sinclair, Kyu-Ha Shim, Todd Henry
Institution: Applied Materials (United States)
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2013961535