Accelerated dielectric breakdown and wear out standard testing methods and structures for reliability evaluation of thin oxides
Year: 1999
Type: article
Source: Microelectronics Reliability
Authors: G Ghibaudo, G Pananakakis, R Kies, E Vincent, C Papadas
Institution: STMicroelectronics (France)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2015175035