Work

Strain mapping technique for performance improvement of strained MOSFETs with scanning transmission electron microscopy

Year: 2008

Type: conference-paper

Source: Technical digest - International Electron Devices Meeting/Technical digest

DOI: 10.1109/iedm.2008.4796717

Authors: N. Nakanishi, S. Kudo, M. Kawakami, T. Hayashi, H. Oda, T. Uchida, Y. Miyagawa, K. Asai, K. Ohnishi, N. Hattori, Y. Hirose, T. Koyama, K. Asayama, E. Murakami

Language: English

Topic: Advancements in Semiconductor Devices and Circuit Design

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2015796028

FWCI: 0.946

Cites: 7

Cited by: 2

Related to: 10