Cost of ownership for future lithography technologies
Year: 2008
Type: conference-paper
DOI: 10.1117/12.804711
Authors: Andrew J. Hazelton, Andrea Wüest, Greg Hughes, Lloyd C. Litt, Frank Goodwin
Institution: Nikon (Japan)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2016659902