Work

Fin stress and pitch measurement using X-ray diffraction reciprocal space maps and optical scatterometry

Year: 2013

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.2023081

Authors: A. C. Diebold, M. Medikonda, G. R. Muthinti, V. K. Kamineni, J. Fronheiser, M. Wormington, B. Peterson, J. Race

Institutions: University at Albany, State University of New York, GlobalFoundries (United States)

Language: English

Topic: X-ray Diffraction in Crystallography

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2017393595

FWCI: 2.896

Cites: 3

Cited by: 3

Related to: 10