Get started
Author

Vimal Kumar Kamineni

A manufacturable platform for photonic quantum computing
2025 · PsiQuantum team, Koen Alexander, et al. · Nature · 328
Optical properties of large-area polycrystalline chemical vapor deposited graphene by spectroscopic ellipsometry
2010 · F. J. Nelson, V. K. Kamineni, et al. · Applied Physics Letters · 186
Layer-by-Layer Nanoassembly of Polyelectrolytes Using Formamide as the Working Medium
2007 · Vimal K. Kamineni, Yuri M. Lvov, et al. · Langmuir · 46
Defect and grain boundary scattering in tungsten: A combined theoretical and experimental study
2018 · Nicholas A. Lanzillo, Hemant Dixit, et al. · Journal of Applied Physics · 38
Optical metrology of Ni and NiSi thin films used in the self-aligned silicidation process
2010 · V. K. Kamineni, M. Raymond, et al. · Journal of Applied Physics · 36
Optical and structural characterization of thermal oxidation effects of erbium thin films deposited by electron beam on silicon
2012 · Himani S. Kamineni, Vimal K. Kamineni, et al. · Journal of Applied Physics · 34
Sensitivity analysis and line edge roughness determination of 28-nm pitch silicon fins using Mueller matrix spectroscopic ellipsometry-based optical critical dimension metrology
2015 · Dhairya J. Dixit, Samuel O’Mullane, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 26
PDF
Optical critical dimension metrology for directed self-assembly assisted contact hole shrink
2016 · Dhairya Dixit, Avery Green, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 21
Electron-phonon interaction effects on the direct gap transitions of nanoscale Si films
2011 · V. K. Kamineni, A. C. Diebold · Applied Physics Letters · 20
PDF
Metrology for block copolymer directed self-assembly structures using Mueller matrix-based scatterometry
2015 · Dhairya J. Dixit, Vimal Kamineni, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 19
Formation of optical barriers with excellent thermal stability in single-crystal sapphire by hydrogen ion implantation and thermal annealing
2011 · William T. Spratt, Mengbing Huang, et al. · Applied Physics Letters · 19
Middle of line RC performance study at the 7 nm node
2017 · Susan Su-Chen Fan, James Hsueh-Chung Chen, et al. · IEEE International Interconnect Technology Conference (IITC) · 17
Mueller based scatterometry measurement of nanoscale structures with anisotropic in-plane optical properties
2013 · Gangadhara R. Muthinti, Manasa Medikonda, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 17
Measurement of periodicity and strain in arrays of single crystal silicon and pseudomorphic Si1−xGex/Si fin structures using x-ray reciprocal space maps
2014 · Manasa Medikonda, Gangadhara R. Muthinti, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 15
PDF
First-Principles Investigations of TiGe/Ge Interface and Recipes to Reduce the Contact Resistance
2017 · Hemant Dixit, Chengyu Niu, et al. · IEEE Transactions on Electron Devices · 14
Assessment of critical dimension small-angle x-ray scattering measurement approaches for FinFET fabrication process monitoring
2014 · Charles M. Settens, Aaron Cordes, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 14
Sidewall roughness and line profile measurement of photoresist and finFET features by cross-section STEM and TEM image for reference metrology
2014 · Kiyoshi Takamasu, Haruki Okitou, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 13
Extension of Far UV spectroscopic ellipsometry studies of High-κ dielectric films to 130 nm
2010 · Vimal K. Kamineni, James N. Hilfiker, et al. · Thin Solid Films · 12
Metrology for directed self-assembly block lithography using optical scatterometry
2014 · Dhairya Dixit, Vimal Kamineni, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 10
Investigation of optical properties of benzocyclobutene wafer bonding layer used for 3D interconnects via infrared spectroscopic ellipsometry
2010 · Vimal K. Kamineni, Pratibha Singh, et al. · Thin Solid Films · 10
X-ray Scattering Methods for Porosity Metrology of Low-k Thin Films
2009 · C. M. Settens, V. K. Kamineni, et al. · AIP conference proceedings · 9
PDF
Specific contact resistivity of n-type Si and Ge M-S and M-I-S contacts
2015 · Jiseok Kim, Phillip J. Oldiges, et al. · International Conference on Simulation of Semiconductor Processes and Devices · 8
Dielectric properties and thickness metrology of strain engineered GaN/AlN/Si (111) thin films grown by MOCVD
2010 · M. Tungare, V.K. Kamineni, et al. · Thin Solid Films · 7
Understanding Ultra-Thin Film Resist and Underlayer Performance through Physical Characterization
2010 · Craig Higgins, Seth Kruger, et al. · Journal of Photopolymer Science and Technology · 7
PDF
Self-Allancd Gate Contact (SAGC) for CMOS technology scaling beyond 7nm
2019 · Ruilong Xie, Chanro Park, et al. · Symposium on VLSI Technology · 6
Works count: 42
Citation count: 961
H-index: 14
I10-index: 20
Year
Topic
Type