Work

Near-surface defects formed by MeV ion implantation into silicon

Year: 1993

Type: article

Source: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

DOI: 10.1016/0168-583x(93)96187-h

Authors: H. Sayama, A. Kinomura, Y. Yuba, M. Takai

Institution: The University of Osaka

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2018232216

FWCI: 1.505

Cites: 15

Cited by: 10

Related to: 10