Patterned crystal growth of GaAs using laser scanning with atomic layer epitaxy
Year: 1991
Type: article
Source: Journal of Crystal Growth
Authors: S. Iwai, T. Meguro, Y. Aoyagi, T. Miyoshi
Institutions: Yamaguchi University, RIKEN
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2052486595
