Work

Resolution Enhancement of Extreme Ultraviolet Microscope Using an Extreme Ultraviolet Beam Splitter

Year: 2008

Type: article

Source: Japanese Journal of Applied Physics

DOI: 10.1143/jjap.47.4872

Authors: Masafumi Osugi, Kazuumi Tanaka, Noriyuki Sakaya, Kazuhiro Hamamoto, Takeo Watanabe, Hiroo Kinoshita

Institutions: University of Hyogo, Japan Science and Technology Agency, Hoya (Japan)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2058412802

FWCI: 2.332

Cites: 8

Cited by: 11

Related to: 10