Work

Impact of surface preparation on nickel–platinum alloy silicide phase formation

Year: 2007

Type: article

Source: Microelectronic Engineering

DOI: 10.1016/j.mee.2007.05.030

Authors: B. Imbert, C. Guichet, S. Bonnetier, S. Zoll, M. Juhel, M. Hopstaken, P. Clifton, O. Thomas

Institutions: Centre National de la Recherche Scientifique, Aix-Marseille Université, STMicroelectronics (France)

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2066676366

FWCI: 1.37

Cites: 8

Cited by: 19

Related to: 10