Work

Ion sources for ion implantation technology (invited)

Year: 2014

Type: article

Source: Review of Scientific Instruments

DOI: 10.1063/1.4852315

Authors: Shigeki Sakai, Nariaki Hamamoto, Yutaka Inouchi, Sei Umisedo, Naoki Miyamoto

Institution: Nissin Ion Equipment Co., Ltd. (Japan)

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2074150822

FWCI:

Cites: 4

Cited by: 5

Related to: 10