Work

Evaluation of the attenuated PSM performance as the shifter transmittance and illumination systems

Year: 1999

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.360214

Authors: Yong-Hoon Kim, JoHyun Park, Jin-Hong Park, Kyung H. Lee, Seong-Woon Choi, Hee-Sun Yoon, Jung-Min Sohn

Institution: Samsung Electronics (South Korea)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2079680751

FWCI: 0.985

Cites:

Cited by: 7

Related to: 10