Work

Strain relaxation of pseudomorphic /(100) heterostructures after hydrogen or helium ion implantation for virtual substrate fabrication

Year: 2001

Type: article

Source: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

DOI: 10.1016/s0168-583x(01)00559-6

Authors: B. Holländer, St. Lenk, S. Mantl, H. Trinkaus, D. Kirch, M. Luysberg, T. Hackbarth, H.-J. Herzog, P.F.P. Fichtner

Institutions: Forschungszentrum Jülich, Daimler (Germany), Universidade Federal do Rio Grande do Sul

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2094979504

FWCI: 5.593

Cites: 24

Cited by: 72

Related to: 10