Work

A High-Stress Liner Comprising Diamond-Like Carbon (DLC) for Strained p-Channel MOSFET

Year: 2008

Type: article

Source: IEEE Electron Device Letters

DOI: 10.1109/led.2007.914103

Authors: Kian-Ming Tan, Ming Zhu, Wei-Wei Fang, Mingchu Yang, Tsung-Yang Liow, Rinus T. P. Lee, Keat Mun Hoe, Chih-Hang Tung, Narayanan Balasubramanian, Ganesh S. Samudra, Yee-Chia Yeo

Institutions: National University of Singapore, Data Storage Institute, Institute of Microelectronics

Language: English

Topic: Advancements in Semiconductor Devices and Circuit Design

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2145170002

FWCI: 3.557

Cites: 14

Cited by: 17

Related to: 10