Work

New calibration method of analytical models for ion implantation

Year: 2002

Type: conference-paper

Source: International Workshop on Statistical Metrology (IWSM)

DOI: 10.1109/iwstm.2000.869302

Authors: F. Roger, P. Scheiblin, D. Poncet, G. Le Carval, C. Laviron, P. Holliger, E. Guichard, J.P. Caire

Institutions: Silvaco Group, Inc. (United States), Commissariat à l'Énergie Atomique et aux Énergies Alternatives, CEA Grenoble, Laboratoire d'Électronique des Technologies de l'Information, Laboratoire d’Electrochimie et de Physico-chimie des Matériaux et des Interfaces

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2154707406

FWCI: 1.666

Cites: 4

Cited by: 2

Related to: 10