Work

Sacrificial Self-Assembled Monolayers for the Passivation of GaAs (100) Surfaces and Interfaces

Year: 2016

Type: article

Source: Chemistry of Materials

DOI: 10.1021/acs.chemmater.6b01732

Authors: Daniel Cuypers, Claudia Fleischmann, Dennis H. van Dorp, Simone Brizzi, Massimo Tallarida, Matthias Müller, Philipp Hönicke, Arne Billen, Ravi Chintala, Thierry Conard, Dieter Schmeißer, Wilfried Vandervorst, Sven Van Elshocht, Silvia Armini, Stefan De Gendt, Christoph Adelmann

Institutions: IMEC, KU Leuven, Brandenburg University of Technology Cottbus-Senftenberg, Physikalisch-Technische Bundesanstalt

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: European Association of National Metrology Institutes, European Commission, Helmholtz-Zentrum Berlin für Materialien und Energie, Seventh Framework Programme

Awards: G2907013871, G3976035198, G6441717323

OpenAlex ID: W2476424271

FWCI: 1.716

Cites: 104

Cited by: 26

Related to: 10