Work

Very high sensitivity mask DUV transmittance mapping and measurements based on non-imaging optics

Year: 2008

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.798801

Authors: Guy Ben-Zvi, Vladimir Dmitriev, Erez Graitzer, Eitan Zait, Ofir Sharoni, Avi Cohen

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2541998407

FWCI: 0.474

Cites:

Cited by: 1

Related to: 10