Work

Fiber-optics Low-coherence Integrated Metrology for In-Situ Non-contact Characterization of Wafer Curvature for Wafers Having Non-uniform Substrate and Thin Film Thickness

Year: 2005

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-875-o9.4

Authors: Wojciech J. Walecki, Alexander Pravdivtsev, Kevin Lai, Manuel Santos, Georgy Mikhaylov, Mihail Mihaylov, Ann Koo

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2948337642

FWCI: 0.713

Cites: 10

Cited by: 3

Related to: 10