Work

Innovative Smart Cut™ Piezo On Insulator (POI) Substrates for 5G acoustic filters

Year: 2020

Type: conference-paper

Source: Technical digest - International Electron Devices Meeting/Technical digest

DOI: 10.1109/iedm13553.2020.9372020

Authors: E. Butaud, S. Ballandras, M. Bousquet, A. Drouin, B. Tavel, I. Huyet, A. Clairet, I. Bertrand, A. Ghorbel, A. Reinhardt

Institutions: Soitec (France), Commissariat à l'Énergie Atomique et aux Énergies Alternatives, CEA Grenoble, Laboratoire d'Électronique des Technologies de l'Information, Université Grenoble Alpes

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W3136038688

FWCI: 10.17

Cites: 10

Cited by: 69

Related to: 10