High-resistivity with PN interface passivation in 22 nm FD-SOI technology for low-loss passives at RF and millimeter-wave frequencies
Year: 2023
Type: article
Source: Solid-State Electronics
Institutions: UCLouvain, GlobalFoundries (Germany), Soitec (France)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W4366609135
