Work

A New Divided Deposition Method of TiN Thin Films for MIM Capacitor Applications

Year: 2004

Type: conference-paper

Source: International Conference on Solid State Devices and Materials (SSDM)

DOI: 10.7567/ssdm.2004.b-9-4

Authors: Shinsuke Sakashita, Takeshi Hayashi, Tomonori Okudaira, Kazutoshi Wakao, Junichi Tsuchimoto, Kenichi Mori, Kiyoteru Kobayashi, Masahiro Yoneda

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W567286802

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