Work

Fabrication of nanowires with high aspect ratios utilized by dry etching with SF6:C4F8 and self-limiting thermal oxidation on Si substrate

Year: 2010

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/1.3455498

Authors: Si-Young Park, Sandro J. Di Giacomo, R. Anisha, Paul R. Berger, Phillip E. Thompson, Ilesanmi Adesida

Institutions: The Ohio State University, Northrop Grumman (United States), United States Naval Research Laboratory, University of Illinois Urbana-Champaign

Language: English

Topic: Nanowire Synthesis and Applications

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Ohio State University

OpenAlex ID: W57032373

FWCI: 0.525

Cites: 27

Cited by: 18

Related to: 10