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Guido Salmaso

A Comparative Study of Cr2O3 Thin Films Obtained by MOCVD using Three Different Precursors
2005 · G. Carta, M. Natali, et al. · Chemical Vapor Deposition · 48
Chemical, morphological and nano-mechanical characterizations of Al2O3 thin films deposited by metal organic chemical vapour deposition on AISI 304 stainless steel
2005 · M. Natali, G. Carta, et al. · Electrochimica Acta · 37
Electrochemical anticorrosion performance evaluation of Al2O3 coatings deposited by MOCVD on an industrial brass substrate
2005 · Francesca Guidi, Giuseppe Moretti, et al. · Electrochimica Acta · 23
ASML NXE pellicle update
2019 · Derk Brouns, Par Broman, et al. · Photomask and next-generation lithography mask technology. Conference · 21
High-transmission EUV pellicles supporting >400W source power
2022 · Mark A. van de Kerkhof, Alexander Klein, et al. · SPIE Optical and EUV Nanolithography · 20
Effects of ion bombardment and gas incorporation on the properties of Mo/a-Si:H multilayers for EUV applications
2003 · V. Rigato, A. Patelli, et al. · Surface and Coatings Technology · 20
Structure and interface properties of Mo/B4C/Si multilayers deposited by rf-magnetron sputtering
2004 · A. Patelli, J. Ravagnan, et al. · Applied Surface Science · 19
0.33 NA EUV systems for high volume manufacturing
2023 · Christophe Smeets, Nico Benders, et al. · SPIE Optical and EUV Nanolithography · 17
Ion bombardment effects on nucleation of sputtered Mo nano-crystals in Mo/B4C/Si multilayers
2005 · A. Patelli, V. Rigato, et al. · Surface and Coatings Technology · 17
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0.33 NA EUV systems for high-volume manufacturing
2022 · Christophe Smeets, Guido Salmaso, et al. · SPIE Optical and EUV Nanolithography · 10
A new generation EUV pellicle to enable future EUV lithographic nodes at enhanced productivity
2021 · Guido Salmaso, Raymond Maas · International Conference on Extreme Ultraviolet Lithography · 10
Characterization of thermally treated Mo/Si multilayer mirrors with standing wave-assisted EXAFS
2006 · M. Rovezzi, F. D’Acapito, et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 7
Design and fabrication considerations of EUVL collectors for HVM
2009 · G. Bianucci, G. L. Cassol, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 4
Grazing-incidence reflectivity of Si-Au coatings for optics with high thermal load
2004 · Luca Poletto, Giampiero Naletto, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 4
Development of multilayer coatings for solar space experiments
2003 · Maria-Guglielmina Pelizzo, Alessandro Patelli, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 4
0.33 NA EUV systems for high-volume manufacturing
2022 · Christophe Smeets, Guido Salmaso, et al. · International Conference on Extreme Ultraviolet Lithography · 3
Technologies for manufacturing of high angular resolution multilayer coated optics for future new hard x-ray missions: a status report
2009 · G. Borghi, D. Vernani, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3
Enabling deposition of hard x-ray reflective coatings as an industrial manufacturing process
2009 · Denis Garoli, Enrico Boscolo Marchi, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2
0.33 NA EUV systems for high-volume manufacturing
2025 · Raymond Maas, Peter Dhaeze, et al. · International Conference on Extreme Ultraviolet Lithography · 1
0.33 NA EUV systems for high-volume manufacturing
2026 · Guido Salmaso, Claire van Lare, et al. · SPIE Optical and EUV Nanolithography
Design and fabrication considerations of EUVL collectors for HVM
2009 · Giovanni Bianucci, G. L. Cassol, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
Anticorrosion performance evaluation of Al2O3 coatings deposited by MOCVD on an industrial brass substrate
2003 · Giuseppe Moretti, Francesca Guidi, et al. · ARCA (Università Ca' Foscari Venezia)
MOCVD deposition of metal-oxide coatings for wear and corrosion protection
2003 · Guido Salmaso, V. Rigato, et al. · ARCA (Università Ca' Foscari Venezia)
Realizzazione e caratterizzazione di ottiche a multistrato per la radiazione nell'estremo ultravioletto e raggi X soffici
2000 · Guido Salmaso
Works count: 24
Citation count: 270
H-index: 10
I10-index: 11
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