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Andreas Gehner
Observed names:
A Gehner,
A. GEHNER,
A. Gehner,
Gehner, A.,
Gehner, Andreas
Institution:
Fraunhofer Institute for Photonic Microsystems
Observed institutions:
Fraunhofer Institute for Microelectronic Circuits and Systems,
Fraunhofer Institute for Photonic Microsystems,
Fraunhofer-Gesellschaft
OpenAlex ID:
A5011586359
Micromirror SLM for femtosecond pulse shaping in the ultraviolet
2003
·
M. Hacker
, G. Stobrawa
, et al.
·
Applied Physics B
·
113
Deformable micromirror devices as phase-modulating high-resolution light valves
1996
·
H Kück
, W Doleschal
, et al.
·
Sensors and Actuators A Physical
·
26
CMOS-Integrable Piston-Type Micro-Mirror Array for Adaptive Optics Made of Mono-Crystalline Silicon using 3-D Integration
2009
·
Martin Lapisa
, Fabian Zimmer
, et al.
·
IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
·
23
MEMS analog light processing: an enabling technology for adaptive optical phase control
2006
·
Andreas Gehner
, Michael Wildenhain
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
19
Drift-Free Micromirror Arrays Made of Monocrystalline Silicon for Adaptive Optics Applications
2012
·
Martin Lapisa
, Fabian Zimmer
, et al.
·
Journal of Microelectromechanical Systems
·
17
New system for fast submicron optical direct writing
1996
·
R. Seltmann
, W. Doleschal
, et al.
·
Microelectronic Engineering
·
13
Active-matrix-addressed micromirror array for wavefront correction in adaptive optics
2001
·
Andreas Gehner
, Wolfgang Doleschal
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
11
New system for fast submicron laser direct writing.
1995
·
Heinz Kueck
, Michael Bollerott
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
11
Deformable Micromirror Devices As Phase Modulating High Resolution Light Valves
2005
·
H. Kuck
, W. Doleschal
, et al.
·
International Conference on Solid-State Sensors, Actuators and Microsystems
·
10
Improved vision by eye aberration correction using an active-matrix-addressed micromirror array
2003
·
Andreas Gehner
, Michael Wildenhain
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
10
Micromirror arrays for wavefront correction
2000
·
Andreas Gehner
, Michael Wildenhain
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
10
Analog Spatial Light Modulators Based on Micromirror Arrays
2021
·
Ulrike Dauderstädt
, Peter Dürr
, et al.
·
Micromachines
·
8
PDF
Tests on micromirror arrays for adaptive optics
2004
·
Jan Liesener
, Werner J. Hupfer
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
8
Hidden-hinge micro-mirror arrays made by heterogeneous integration of two mono-crystalline silicon layers
2011
·
M. A. Lapisa
, F. Zimmer
, et al.
·
IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
·
7
CMOS integrable micromirrors with highly improved drift-stability
2007
·
Jan U. Schmidt
, Jens Knobbe
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
7
Novel 512 × 320 Tip-Tilt Micro Mirror Array in a CMOS-Integrated, Scalable Process Technology
2018
·
A. Gehner
, P. Durr
, et al.
·
International Conference on Optical MEMS and Nanophotonics
·
6
Heterogeneous 3D integration of hidden hinge micromirror arrays consisting of two layers of monocrystalline silicon
2013
·
Martin Lapisa
, Fabian Zimmer
, et al.
·
Journal of Micromechanics and Microengineering
·
6
Micromirrors for direct writing systems and scanners
1999
·
Hubert K. Lakner
, Wolfgang Doleschal
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
6
New system for fast submicron laser direct writing
1995
·
Heinz Kueck
, Michael Bollerott
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
5
Challenges of monolithic MEMS-on-CMOS integration for spatial light modulators
2021
·
Christoph K. Hohle
, Sebastian Döring
, et al.
·
MOEMS and Miniaturized Systems
·
4
MEMS phase former kit for high-resolution wavefront control
2005
·
Andreas Gehner
, Michael Wildenhain
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
4
High-throughput optical direct write lithography
1997
·
Paufler, J.
, Kück, H.
, et al.
·
Fraunhofer-Publica (Fraunhofer-Gesellschaft)
·
4
Novel CMOS-integrated 512x320 tip-tilt micro mirror array and related technology platform
2020
·
Andreas Gehner
, Sebastian Döring
, et al.
·
MOEMS and Miniaturized Systems
·
3
Photonic microsystems: an enabling technology for light deflection and modulation
2004
·
Harald Schenk
, Alexander Wolter
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
3
Micro-actuator with extended analog deflection at low drive voltage
2006
·
Peter Dürr
, Andreas Gehner
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
2
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Works count:
47
Citation count:
340
H-index:
10
I10-index:
11
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