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Masaaki Matsukuma

Observed names: M Matsukuma, M. Matsukuma, Matsukuma Masaaki, Matsukuma, M., Matsukuma, Masaaki
ORCID: 0000-0002-1744-6450
Observed ORCID: 0000-0002-1744-6450
OpenAlex ID: A5017673564
Spatiotemporal structure of low frequency waves in a magnetized plasma device
2003 · M. Matsukuma, Th. Pierre, et al. · Physics Letters A · 37
Multiscale plasma and feature profile simulations of plasma-enhanced chemical vapor deposition and atomic layer deposition processes for titanium thin film fabrication
2019 · Kazuki Denpoh, Paul Moroz, et al. · Japanese Journal of Applied Physics · 25
Modeling of very high frequency large-electrode capacitively coupled plasmas with a fully electromagnetic particle-in-cell code
2023 · D Eremin, E Kemaneci, et al. · Plasma Sources Science and Technology · 21
Dissipative particle dynamics study on directed self-assembly in holes
2013 · T. Nakano, M. Matsukuma, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 17
Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO 2 ) plasma enhanced atomic layer deposition (PEALD) processes
2020 · Hu Li, Tomoko Ito, et al. · Japanese Journal of Applied Physics · 14
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Surface oxidation model in plasma enhanced atomic layer deposition for silicon oxide films including various aminosilane precursors
2019 · Kosuke Yamamoto, Ayuta Suzuki, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 7
Molecular dynamics simulation of microcrystalline Si deposition processes by silane plasmas
2007 · Masaaki Matsukuma, Satoshi Hamaguchi · Thin Solid Films · 7
Numerical strategy for solving the Boltzmann equation with variable E/N using physics-informed neural networks
2023 · Jin Seok Kim, Kazuki Denpoh, et al. · Journal of Physics D Applied Physics · 4
Observation of Chaotic Behavior Caused by Ion-Ion Instability
2000 · Masaaki Matsukuma, Kenta Kaimoto, et al. · Journal of the Physical Society of Japan · 4
Ion impact ionization in capacitively coupled Ar plasma captured using GPU-parallelized particle-in-cell, Monte Carlo collision simulation with a comprehensive ion-neutral reactive collision model
2025 · Kazuki Denpoh, Jin Seok Kim, et al. · Japanese Journal of Applied Physics · 3
Extension of ion-neutral reactive collision model DNT+ to polar molecules based on average dipole orientation theory
2024 · Kazuki Denpoh, Taiki Kato, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 3
Measurements of spatial distributions of electron density and temperature of 450 MHz UHF plasma using laser Thomson scattering
2020 · Yiming Pan, Kentaro Tomita, et al. · Japanese Journal of Applied Physics · 3
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Modelling of Plasma Surface Interaction
2007 · Satoshi Hamaguchi, Masashi Yamashiro, et al. · Journal of Physics Conference Series · 2
Nonlinear Saturation Mechanism of Ion–Ion Instability Due to Particle Trapping Effect
2001 · Masaaki Matsukuma, Yoshinobu Kawai · Journal of the Physical Society of Japan · 2
Origins of intrinsic stress in disordered carbon materials: A first-principles study
2026 · Yusuke Ando, Hu Li, et al. · Physical review. B./Physical review. B · 1
Time evolution of electrode voltage distribution in large-area capacitively coupled plasmas
2006 · Masaaki Matsukuma, Satoshi Hamaguchi · Thin Solid Films · 1
Non-Maxwellian shape of electron distribution function in ion acoustic turbulence
2001 · E. Farshi, T. Fukuyama, et al. · IEEE Transactions on Plasma Science · 1
Molecular dynamics insights into flowable chemical vapor deposition: Gap-fill mechanisms and transport properties
2026 · Hu Li, Takeo Nakano, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
Monte Carlo simulation of fast neutrals produced and transported in a dual-frequency capacitively coupled Ar/CF 4 plasma sheath
2026 · Kazuki Denpoh, Masaaki Matsukuma · Japanese Journal of Applied Physics
Enhanced Vertical Conductivity in Few-layer Graphene and Graphite with Transition Metal Intercalation: a Theoretical Study
2020 · Zeyuan Ni, Takashi Matsumoto, et al. · IEEE International Interconnect Technology Conference (IITC)
Hybrid molecular dynamics simulation for plasma induced damage analysis
2016 · Masaaki Matsukuma · Bulletin of the American Physical Society
Influence of the normal modes on the plasma uniformity in large scale CCP reactors
2016 · Denis Eremin, Ralf Peter Brinkmann, et al. · Bulletin of the American Physical Society
A PIC-MCC plasma model created on COMSOL Multiphysics
2016 · Ayuta Suzuki, Satoru Kawaguchi, et al. · The Japan Society of Applied Physics
Mechanisms of Hydrocarbon Based Polymer Etch
2015 · Barton Lane, Peter L. G. Ventzek, et al. · Bulletin of the American Physical Society
Damage formation mechanisms of Si and Ge substrates by ion bombardment
2015 · Masaaki Matsukuma, T. Morimoto, et al. · Bulletin of the American Physical Society
Works count: 37
Citation count: 152
H-index: 7
I10-index: 5
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