Product
Help
Pricing
About
Jobs
Log in
Get started
Author
Add to collection
Gavin C. Rider
Observed names:
Gavin C Rider,
Gavin Rider,
Rider, Gavin
ORCID:
0000-0003-0360-3133
Observed ORCID:
0000-0003-0360-3133
OpenAlex ID:
A5029486479
Electric field-induced progressive CD degradation in reticles
2008
·
Gavin C. Rider
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
12
Experimental quantification of reticle electrostatic damage below the threshold for ESD
2008
·
Gavin C. Rider
, Thottam S. Kalkur
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
12
High sensitivity electric field monitoring system for control of field-induced CD degradation in reticles (EFM)
2009
·
Thomas Sebald
, Gavin Rider
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
5
Electrostatic Damage in Semiconductor Manufacturing Through the Inappropriate Use of Grounding
2022
·
Larry B Levit
, Gavin C Rider
, et al.
·
Annual EOS/ESD Symposium (EOS/ESD)
·
3
Current understanding of the electrostatic risk to reticles used in microelectronics and similar manufacturing processes
2018
·
Gavin C. Rider
·
Journal of Micro/Nanopatterning Materials and Metrology
·
3
PDF
Electrostatic risk to reticles in the nanolithography era
2016
·
Gavin C. Rider
·
Journal of Micro/Nanopatterning Materials and Metrology
·
3
Field-induced and photon-induced CD degradation in transmission reticles: a comparative review
2022
·
Gavin Rider
·
Journal of Micro/Nanopatterning Materials and Metrology
·
2
PDF
A critique of the approach to controlling electrostatic risk in semiconductor production and identification of a potential risk from the use of equipotential bonding
2019
·
Gavin C Rider
, Microtome, Colorado Springs, CO 80907, USA
·
AIMS Electronics and Electrical Engineering
·
2
Myths, Misconceptions and Mistakes in the Electrostatic Protection of Field-Sensitive Items – Why It’s Time to Re-Visit Device Protection
2021
·
Gavin C. Rider
·
Global Journal of Researches in Engineering
·
1
Why SEMI Standard E163 should be followed for the Protection of Extremely Electrostatic-Sensitive Semiconductors and Similar Devices during Manufacturing, Packaging and Handling
2020
·
Gavin C Rider
·
Global Journal of Researches in Engineering
·
1
PDF
How to Protect Reticles From Electrostatic Damage
2018
·
Gavin C. Rider
·
SPIE eBooks
·
1
How to Protect Reticles from Electrostatic Damage
2018
·
Gavin C. Rider
·
SPIE eBooks
·
1
Electrostatic risks to reticles and damage prevention methodology
2016
·
Gavin C. Rider
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
Show more works
View as search
Works count:
16
Citation count:
48
H-index:
3
I10-index:
2
Year
Topic
Type
