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Arthur Keigler
Observed names:
A. Keigler,
A. L. Keigler,
Arthur L. Keigler
Institution:
Tokyo Electron (Japan)
Observed institutions:
Tokyo Electron (Japan),
Massachusetts Institute of Technology
OpenAlex ID:
A5035731117
Diffusion Boundary Layer Studies in an Industrial Wafer Plating Cell
2005
·
B. Q. Wu
, Z. Liu
, et al.
·
Journal of The Electrochemical Society
·
21
PDF
Electron-beam-induced current measurements in silicon-on-insulator films prepared by zone-melting recrystallization
1983
·
E. W. Maby
, H. A. Atwater
, et al.
·
Applied Physics Letters
·
10
Enabling 3-D design
2007
·
Arthur Keigler
, Kathy O'Donnell
, et al.
·
6
Reaction Engineering of Through-Chip Via Filling for Wafer-Level 3D Packaging
2007
·
D.P. Barkey
, J. Callahan
, et al.
·
IEEE Electronic Components and Technology Conference (ECTC)
·
5
Electrocodeposition of Silver Particles with Tin for Fabrication of Lead-Free Solder Bumps
2006
·
Dale P. Barkey
, B. Wu
, et al.
·
ECS Transactions
·
3
PDF
The Role of Mass Transfer in Removal of Cross-Linked Sacrificial Layers in 3DI Applications
2014
·
Mani Sobhian
, Daniel L. Goodman
, et al.
·
Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena
·
2
Electroplated Copper Pillar Feature Effects
2010
·
Jim Zhang
, Arthur Keigler
, et al.
·
Additional Conferences (Device Packaging HiTEC HiTEN & CICMT)
·
2
PDF
Studies on Through-Chip Via Filling for Wafer-Level 3D Packaging
2006
·
D. Barkey
, John Callahan
, et al.
·
ECS Meeting Abstracts
·
2
PDF
Solder Void Formation in Lead Free Solder
2012
·
Charles L. Arvin
, Eric Perfecto
, et al.
·
ECS Meeting Abstracts
·
1
PDF
Challenges of ECD Panel Fan-Out in High Volume and Potential Solutions
2017
·
Jon Hander
, Demetrius Papapanayiotou
, et al.
·
Wafer-Level Packaging Symposium
High-Speed Removal of Thick Negative Photoresist in Advanced Packaging Applications
2013
·
Mani Sobhian
, Arthur Keigler
, et al.
·
Wafer-Level Packaging Symposium
TSV Filling
2011
·
Arthur Keigler
·
Pan Stanford Publishing eBooks
Interfacial Voids at the Under Bump Metallurgy and Solder Interface
2011
·
Charles L. Arvin
, Eric Perfecto
, et al.
·
ECS Meeting Abstracts
PDF
Cu Pillar Electroplating Process Control for Wafer Level Packaging
2010
·
Jim Zhang
, Richard Hollman
, et al.
·
Wafer-Level Packaging Symposium
Robust Through-Silicon-Via Electroplating
2007
·
Arthur L. Keigler
, Bill Wu
, et al.
·
ECS Meeting Abstracts
PDF
Pattern Effects on Electroplated Copper Pillars
2006
·
Arthur Keigler
, Bill Wu
, et al.
·
Wafer-Level Packaging Symposium
Formation of AuSn Bumps for 3D Chip Stacking by Electrodeposition
2006
·
B. Wu
, Al Ruff
, et al.
·
ECS Meeting Abstracts
PDF
An Economical Wafer Electroplating System for Thick Film Structures
2006
·
Arthur Keigler
, Zhenqui Liu
, et al.
·
ECS Meeting Abstracts
PDF
Formation of Copper Pillar Bumps by High Speed Copper Electroplating
2006
·
Bill Wu
, Zhenqui Liu
, et al.
·
ECS Meeting Abstracts
PDF
Electrocodeposition of Silver Particles with Tin for Fabrication of Lead-Free Solder Bumps
2006
·
Dale Barkey
, B. Wu
, et al.
·
ECS Meeting Abstracts
PDF
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Works count:
20
Citation count:
52
H-index:
4
I10-index:
2
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