Get started
Author

D. S. Kibalov

Observed names: D S Kibalov, D.S. Kibalov, Dmitry Kibalov, Dmitry S. Kibalov, Д.С. Кибалов
Institution: Kurchatov Institute
OpenAlex ID: A5054356824
The ability of corneal epithelial cells to recognize high aspect ratio nanostructures
2010 · Elizabeth J. Tocce, Valery K. Smirnov, et al. · Biomaterials · 60
Technology for nanoperiodic doping of a metal oxide semiconductor field-effect transistor channel using a self-forming wave-ordered structure
2003 · V K Smirnov, D S Kibalov, et al. · Nanotechnology · 53
Wave-ordered structures formed on SOI wafers by reactive ion beams
1999 · V.K. Smirnov, D.S. Kibalov, et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 39
Semipolar GaN(10–11) Epitaxial Layer Prepared on Nano‐Patterned SiC/Si(100) Template
2018 · Vasily Bessolov, Anna Zubkova, et al. · physica status solidi (b) · 15
Properties of Semipolar GaN Grown on a Si(100) Substrate
2019 · V. N. Bessolov, E. V. Konenkova, et al. · Semiconductors · 9
Semipolar GaN Layers Grown on Nanostructured Si(100) Substrate
2018 · V. N. Bessolov, E. V. Konenkova, et al. · Technical Physics Letters · 9
Formation of Semipolar Group-III-Nitride Layers on Textured Si(100) Substrates with Self-Forming Nanomask
2021 · V. N. Bessolov, E. V. Konenkova, et al. · Semiconductors · 6
P‐168: Simulation of Sub‐100nm Gratings Incorporated in LCD Stack
2006 · Michael Paukshto, Konstantin Lovetsky, et al. · SID Symposium Digest of Technical Papers · 6
SIMS analysis of ultrathin implanted arsenic layers in silicon
2004 · D. S. Kibalov, O. M. Orlov, et al. · Technical Physics Letters · 4
How to analyze high‐aspect ratio pits with the coaxial scanning auger microprobe
1995 · D. S. Kibalov, V. K. Smirnov · Scanning · 3
Self-Forming Silicon Nitride Nanomask and Its Applications
2024 · V. K. Smirnov, D. S. Kibalov, et al. · Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques · 2
Образование полуполярных III-нитридных слоев на поверхности Si(100), структурированной с помощью самоформирующейся наномаски
2021 · В.Н. Бессолов, Е.В. Коненкова, et al. · Физика и техника полупроводников · 2
PDF
Cвойства полуполярного GaN, выращенного на подложке Si(100)
2019 · А.В. Соломникова, В.Н. Бессолов, et al. · Физика и техника полупроводников · 1
PDF
Comparative analysis of two methods for calculating reflectance of black silicon
2015 · I M Akhmedzhanov, D S Kibalov, et al. · Quantum Electronics · 1
Wavy surface nanostructures formed in amorphous silicon films by sputtering with nitrogen ions
2003 · I. V. Zhuravlev, D. S. Kibalov, et al. · Technical Physics Letters · 1
Temperature Dependence of the Nanostructure Morphology during Sputtering of Silicon by Nitrogen Ions
2025 · V. K. Smirnov, D. S. Kibalov, et al. · Russian Microelectronics
Полуполярные GaN-слои на наноструктурированной Si(100)-подложке
2018 · В.Н. Бессолов, Е.В. Коненкова, et al. · Письма в журнал технической физики
PDF
Wavy nanorelief transferred to the surface of various materials
2003 · D. S. Kibalov, I. V. Zhuravlev, et al. · Technical Physics Letters
Method of measuring the resolution of a scanning electron microscope
1990 · V. G. Dyukov, D. S. Kibalov · Measurement Techniques
Works count: 19
Citation count: 211
H-index: 6
I10-index: 4
Year
Topic
Type