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Ulrike A. Dauderstädt

Observed names: Dauderstädt, U., Dauderstädt, U.A., Dauderstädt, Ulrike, U Dauderstadt, U. A. Dauderstädt, U. Dauderstadt, U. Dauderstädt, U.A. Dauderstadt, U.A. Dauderstädt, Ulrike . Dauderstädt, Ulrike A. Dauderstadt, Ulrike A. Dauderstaedt, Ulrike A. Dauderstädt, Ulrike Dauderstaedt, Ulrike Dauderstädt
ORCID: 0000-0001-7297-3811
Observed ORCID: 0000-0001-7297-3811
OpenAlex ID: A5076332768
Silicon accelerometer based on thermopiles
1995 · U.A. Dauderstädt, P.H.S. de Vries, et al. · Sensors and Actuators A Physical · 71
Temperature dependence and drift of a thermal accelerometer
1998 · U.A. Dauderstädt, P.M. Sarro, et al. · Sensors and Actuators A Physical · 39
Silicon sensors
1995 · S Middelhoek, A A Bellekom, et al. · Measurement Science and Technology · 36
Design and fabrication of micromirror arrays for UV lithography
2001 · Hubert K. Lakner, Peter Duerr, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 28
Advances in SLM development for microlithography
2009 · Ulrike Dauderstädt, Per Askebjer, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 19
Micro Mirrors for High-speed Laser Deflection and Patterning
2014 · Harald Schenk, Jan Grahmann, et al. · Physics Procedia · 18
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Simulation aspects of a thermal accelerometer
1996 · U.A. Dauderstädt, P.H.S. de Vries, et al. · Sensors and Actuators A Physical · 18
High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications
2014 · Jan-Uwe Schmidt, Ulrike A. Dauderstaedt, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 16
Application of spatial light modulators for microlithography
2004 · Ulrike A. Dauderstaedt, Peter Duerr, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 16
New laser pattern generator for DUV using a spatial light modulator
2001 · Ulric Ljungblad, Ulrike Dauderstädt, et al. · Microelectronic Engineering · 16
Mechanical stability of spatial light modulators in microlithography
2005 · Ulrike A. Dauderstadt, Peter Duerr, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 12
In situ bow change of Al-alloy MEMS micromirrors during 248-nm laser irradiation
2016 · Alexander Mai, Christopher Bunce, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 10
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Analog Spatial Light Modulators Based on Micromirror Arrays
2021 · Ulrike Dauderstädt, Peter Dürr, et al. · Micromachines · 9
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Charging effects in micromirror spatial light modulators
2008 · Ulrike A. Dauderstädt, Peter Duerr, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 9
Temperature dependence and drift of a thermal accelerometer
2002 · U.A. Dauderstadt, P.M. Sarro, et al. · International Conference on Solid-State Sensors, Actuators and Microsystems · 9
Characterization of spatial light modulators for microlithography
2003 · Peter Duerr, Ulrike Dauderstaedt, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 7
Operation of spatial light modulators in DUV light
2003 · Ulrike Dauderstaedt, Peter Duerr, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 6
Reliability test and failure analysis of optical MEMS
2002 · P. Durr, U. Dauderstadt, et al. · IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) · 6
Micro-opto-electro-mechanical systems technology and its impact on photonic applications
2005 · Harald Schenk, Alexander Wolter, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 5
Compressive sensing instrumental concepts for space applications
2022 · Valentina Raimondi, Massimo Baldi, et al. · Unconventional Optical Imaging · 4
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Temperature measurement on MOEMS micromirror plates under illumination
2010 · Ingo Wullinger, Dirk Rudloff, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 4
Designing a Compressive Sensing Demonstrator of an Earth Observation Payload in the Visible and Medium Infrared: Instrumental Concept and Main Features
2021 · Valentina Raimondi, Luigi Acampora, et al. · International Workshop on Advanced Infrared Technology and Applications (AITA) · 3
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In situ surface topography measurement of MOEMS structures under laser exposure
2011 · Alexander Mai, Mathias Krellmann, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3
Photonic microsystems: an enabling technology for light deflection and modulation
2004 · Harald Schenk, Alexander Wolter, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3
Spatial Light Modulator-Based Architecture to Implement a Super-Resolved Compressive Instrument for Earth Observation
2021 · Valentina Raimondi, Luigi Acampora, et al. · IEEE International Geoscience and Remote Sensing Symposium (IGARSS) · 2
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Works count: 44
Citation count: 379
H-index: 11
I10-index: 12
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