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Kwan-Yong Lim
Observed names:
Kwan-yong Lim,
Lim Kwan-yong
Institution:
GlobalFoundries (United States)
Observed institutions:
SK Group (United States),
Samsung (South Korea),
GlobalFoundries (United States),
Samsung Electronics (South Korea)
OpenAlex ID:
A5112426751
Adhesion and interface chemical reactions of Cu/polyimide and Cu/TiN by XPS
2003
·
Won-Jun Lee
, Youn-Seoung Lee
, et al.
·
Applied Surface Science
·
105
Characteristics of n+ polycrystalline-Si/Al2O3/Si metal–oxide– semiconductor structures prepared by atomic layer chemical vapor deposition using Al(CH3)3 and H2O vapor
2001
·
Dae-Gyu Park
, Heung-Jae Cho
, et al.
·
Journal of Applied Physics
·
84
Robust ternary metal gate electrodes for dual gate CMOS devices
2002
·
Dae-Gyu Park
, Tae-Ho Cha
, et al.
·
Technical digest - International Electron Devices Meeting/Technical digest
·
66
Impact of atomic-layer-deposited TiN on the gate oxide quality of W/TiN/SiO2/Si metal–oxide–semiconductor structures
2002
·
Dae-Gyu Park
, Kwan-Yong Lim
, et al.
·
Applied Physics Letters
·
50
Electrical characteristics and thermal stability of n+ polycrystalline- Si/ZrO2/SiO2/Si metal–oxide–semiconductor capacitors
2002
·
Kwan-Yong Lim
, Dae-Gyu Park
, et al.
·
Journal of Applied Physics
·
42
Novel stress-memorization-technology (SMT) for high electron mobility enhancement of gate last high-k/metal gate devices
2010
·
Kwan-Yong Lim
, Hyunjung Lee
, et al.
·
Technical digest - International Electron Devices Meeting/Technical digest
·
37
Novel damage-free direct metal gate process using atomic layer deposition
2002
·
Dae-Gyu Park
, Kwan-Yong Lim
, et al.
·
Symposium on VLSI Technology
·
17
Effects of TiN Deposition on the Characteristics of W/TiN/SiO[sub 2]/Si Metal Oxide Semiconductor Capacitors
2001
·
Dae-Gyu Park
, Heung-Jae Cho
, et al.
·
Journal of The Electrochemical Society
·
16
Thermal Stability of TaSi[sub x]N[sub y] Films Deposited by Reactive Sputtering on SiO[sub 2]
2003
·
You-Seok Suh
, Greg P. Heuss
, et al.
·
Journal of The Electrochemical Society
·
15
PDF
Boron penetration and thermal instability of p+ polycrystalline-Si/ZrO2/SiO2/n-Si metal-oxide-semiconductor structures
2002
·
Dae-Gyu Park
, Kwan-Yong Lim
, et al.
·
Journal of Applied Physics
·
15
Technology viable DC performance elements for Si/SiGe channel CMOS FinFTT
2016
·
Gen Tsutsui
, Ruqiang Bao
, et al.
·
Technical digest - International Electron Devices Meeting/Technical digest
·
12
Suppressed boron penetration in p+ polycrystalline-Si/Al2O3/Si metal–oxide–semiconductor structures
2002
·
Heung-Jae Cho
, Dae-Gyu Park
, et al.
·
Applied Physics Letters
·
11
Epitaxial C49–TiSi2 phase formation on the silicon (100)
2003
·
Jun-Mo Yang
, Ju-Chul Park
, et al.
·
Journal of Applied Physics
·
9
Roles of Ti, TiN, and WN as an Interdiffusion Barrier for Tungsten Dual Polygate Stack in Memory Devices
2007
·
Min Gyu Sung
, Kwan-Yong Lim
, et al.
·
Japanese Journal of Applied Physics
·
8
Reliability Characteristics of W/WN/TaO[sub x]N[sub y]/SiO[sub 2]/Si Metal Oxide Semiconductor Capacitors
2002
·
Heung-Jae Cho
, Tae-Ho Cha
, et al.
·
Journal of The Electrochemical Society
·
7
Novel Capacitorless Single-Transistor Charge-Trap DRAM (1T CT DRAM) Utilizing Electrons
2010
·
M Gunhan Ertosun
, Kwan-Yong Lim
, et al.
·
IEEE Electron Device Letters
·
5
Gate Oxide Reliability Characterization of Tungsten Polymetal Gate with Low-Contact-Resistive WSix/WN Diffusion Barrier in Memory Devices
2007
·
Min Gyu Sung
, Kwan-Yong Lim
, et al.
·
Japanese Journal of Applied Physics
·
5
PDF
Impact of Thin WSIX Insertion in Tungsten Polymetal Gate on Gate Oxide Reliability and Gate Contact Resistance
2006
·
Min Sung
, Kwan-yong Lim
, et al.
·
IEEE International Reliability Physics Symposium proceedings
·
5
Dependence of Gate Interfacial Resistance on the Formation of Insulative Boron–Nitride for p-Channel Metal–Oxide–Semiconductor Field-Effect Transistor in Tungsten Dual Polygate Memory Devices
2008
·
Min Gyu Sung
, Kwan-Yong Lim
, et al.
·
Japanese Journal of Applied Physics
·
4
PDF
Reliability of Recess-channel Gate Cell Transistor under Gate-Induced Drain Leakage Stress and Positive Bias Fowler-Nordheim Gate Stress
2006
·
Heung-jae Cho
, Yong Kim
, et al.
·
European Solid-State Device Research Conference
·
4
Effect of gate hard mask and sidewall spacer structures on the gate oxide reliability of W∕WNx∕poly-Si gate MOSFET for high density DRAM applications
2005
·
Kwan-Yong Lim
, Heung-Jae Cho
, et al.
·
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
·
4
Degradation of Nitride/W/WNx/Poly-Si Gate Stack by Post-Thermal Processes
2005
·
Heung-Jae Cho
, Se-Aug Jang
, et al.
·
Japanese Journal of Applied Physics
·
4
PDF
Studies on the interfacial and crystallographic characteristics of Al2O3∕SiO2∕Si and ZrO2∕SiO2∕Si stacks
2005
·
Joong-Jung Kim
, Jun-Mo Yang
, et al.
·
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
·
4
Influence of Hydrogen Incorporation on the Reliability of Gate Oxide Formed by Using Low-Temperature Plasma Selective Oxidation Applicable to Sub-50-nm W-Polymetal Gate Devices
2008
·
Kwan-Yong Lim
, Min-Gyu Sung
, et al.
·
IEEE Electron Device Letters
·
3
Impact of gate sidewall spacer structures on DRAM cell transistors under Fowler-Nordheim and gate-induced drain leakage stress conditions
2004
·
Kwan-Yong Lim
, Se-Aug Jang
, et al.
·
IEEE International Reliability Physics Symposium proceedings
·
2
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Works count:
41
Citation count:
539
H-index:
11
I10-index:
12
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