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T. Takeuchi
Observed name:
Takayuki Takeuchi Takayuki Takeuchi
Institution:
NEC (Japan)
Observed institutions:
NEC (Japan),
Panasonic (Japan)
OpenAlex ID:
A5113780539
Preparation and Properties of (Pb, La)TiO3 Pyroelectric Thin Films by RF-Magnetron Sputtering
1993
·
Nobuaki Nagao
, Takayuki Takeuchi Takayuki Takeuchi
, et al.
·
Japanese Journal of Applied Physics
·
45
PDF
A 60-ns 1-Mb nonvolatile ferroelectric memory with a nondriven cell plate line write/read scheme
1996
·
H. Koike
, T. Otsuki
, et al.
·
IEEE Journal of Solid-State Circuits
·
42
A call admission control for ATM networks based on individual multiplexed traffic characteristics
2002
·
T. Murase
, H. Suzuki
, et al.
·
International Conference on Communications
·
38
A 60 ns 1 Mb nonvolatile ferroelectric memory with non-driven cell plate line write/read scheme
2002
·
H. Koike
, T. Otsuki
, et al.
·
Digest of technical papers/Digest of technical papers - IEEE International Solid-State Circuits Conference
·
24
A burst traffic control strategy for ATM networks
2002
·
H. Suzuki
, T. Murase
, et al.
·
Globecom
·
24
Comprehensive Chemistry Designs in Porous SiOCH Film Stacks and Plasma Etching Gases for Damageless Cu Interconnects in Advanced ULSI Devices
2008
·
Y. Hayashi
, H. Ohtake
, et al.
·
IEEE Transactions on Semiconductor Manufacturing
·
21
Compositional design of Pb(Zr, Ti)O/sub 3/ for highly reliable ferroelectric memories
2002
·
N. Inoue
, T. Takeuchi
, et al.
·
IEEE Transactions on Electron Devices
·
16
A ferroelectric capacitor over bit-line (F-COB) cell for high density nonvolatile ferroelectric memories
2002
·
N. Tanabe
, T. Matsuki
, et al.
·
Symposium on VLSI Technology
·
14
Robust porous SiOCH/Cu interconnects with ultrathin sidewall protection liners
2006
·
M. Tada
, T. Tamura
, et al.
·
IEEE Transactions on Electron Devices
·
13
Highly reliable, 65 nm-node Cu dual damascene interconnects with full porous-SiOCH (k=2.5) films for low-power ASICs
2004
·
M. Ueki
, M. Narihiro
, et al.
·
Symposium on VLSI Technology
·
11
A 65nm-node, Cu interconnect technology using porous SiOCH film (k=2.5) covered with ultra-thin, low-k pore seal (k=2.7)
2004
·
M. Tada
, Y. Harada
, et al.
·
Technical digest - International Electron Devices Meeting/Technical digest
·
9
Cu dual damascene interconnects in porous organosilica film with organic hard-mask and etch-stop layers for 70 nm-node ULSIs
2003
·
M. Tada
, Y. Harada
, et al.
·
IEEE International Interconnect Technology Conference (IITC)
·
9
High tolerance operation of 1T/2C FeRAMs for the variation of cell capacitors characteristics
2002
·
N. Tanabe
, S. Kobayashi
, et al.
·
Symposium on VLSI Technology
·
9
45nm-node Interconnects with Porous SiOCH-Stacks, Tolerant of Low-Cost Packaging Applications
2007
·
N. Inoue
, M. Tagami
, et al.
·
IEEE International Interconnect Technology Conference (IITC)
·
8
High-Performance Cu-Interconnects with Novel Seamless Low-k SiOCH Stacks (SEALS) Featured by Compositional Modulation Process for 45nm-Node ULSI Devices
2006
·
M. Tagami
, H. Ohtake
, et al.
·
Symposium on VLSI Technology
·
7
A metallurgical prescription for electromigration (EM) reliability improvment in scaled-down, Cu dual damascene interconnects
2006
·
M. Tada
, M. Abe
, et al.
·
IEEE International Interconnect Technology Conference (IITC)
·
6
Plasma Co-polymerization Technology with Molecular-level Structure Tightening in "In-situ" SiOCH Stacks for 32nm-node Cu Interconnects
2006
·
M. Tada
, H. Yamamoto
, et al.
·
Technical digest - International Electron Devices Meeting/Technical digest
·
6
Feasibility study of a novel molecular-pore-stacking (MPS), SiOCH film in fully-scale-down, 45nm-node Cu damascene interconnects
2005
·
M. Tada
, H. Ohtake
, et al.
·
Symposium on VLSI Technology
·
6
Novel molecular-structure design for PECVD porous SiOCH films toward 45nm node, ASICs with k=2.3
2004
·
Y. Hayashi
, F. Itoh
, et al.
·
IEEE International Interconnect Technology Conference (IITC)
·
6
High performance Cu interconnects with damage-less full molecular-pore-stack (MPS) SiOCH for 32nm-node LSIs and beyond
2008
·
M. Ueki
, M. Tagami
, et al.
·
Technical digest - International Electron Devices Meeting/Technical digest
·
4
Cost-effective and High Performance Cu Interconnects (keff=2.75) with Continuous SiOCH Stack Incorporating a Low-k Barrier Cap (k=3.1)
2007
·
M. Ueki
, H. Yamamoto
, et al.
·
Technical digest - International Electron Devices Meeting/Technical digest
·
4
A robust 45 nm-node, dual damascene interconnects with high quality cu/barrier interface by a novel oxygen absorption process
2005
·
M. Abe
, K. Motoyama
, et al.
·
Technical digest - International Electron Devices Meeting/Technical digest
·
3
Preparation and properties of lanthanum modified PbTiO/sub 3/ thin films by rf-magnetron sputtering
2002
·
K. Iijima
, T. Takeuchi
, et al.
·
IEEE International Symposium on Applications of Ferroelectrics (ISAF)
·
3
Sputtering process design of PZT capacitors for stable FeRAM operation
2002
·
N. Inoue
, T. Takeuchi
, et al.
·
Technical digest - International Electron Devices Meeting/Technical digest
·
3
RF performance upgrading of low-power 40nm-node CMOS devices by extremely low-resistance partially-thickened local (PTL)-interconnects
2009
·
K. Hijioka
, J. Kawahara
, et al.
·
Technical digest - International Electron Devices Meeting/Technical digest
·
2
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Works count:
30
Citation count:
336
H-index:
10
I10-index:
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